3M™ UV-Curable Adhesive LC-3200 is a 100% solids UV curable acrylic adhesive. 3M adhesive LC-3200 is suitable for temporary wafer bonding of silicon wafers and other substrates to support glass carriers using the 3M™ Wafer Support System.
A. Semiconductor wafer
B. 3M™ UV-Curable Adhesive LC-3200 (this product)
C. 3M™ Light-To-Heat Conversion Release Coating (LTHC Ink)
D. Glass carrier
3M™ Liquid UV-Curable Adhesive LC-3200 is applied between the semiconductor wafer and the customer-supplied support glass carrier. Rubber based adhesive cures under UV light. It laminates to the wafer and, when used with 3M™ Light-to-Heat-Conversion Release Coating, bonds firmly but temporarily to the glass carrier. It debonds cleanly via laser irradiation, preserving the integrity of the glass carrier for reuse and recycling.